| rdf:type | <https://jpsearch.go.jp/term/type/図書> |
| rdfs:label | "Silicon wet bulk micromachining for MEMS" |
| schema:name | "Silicon wet bulk micromachining for MEMS" |
| ns0:accessInfo | #accessinfo |
| ns0:agential 2 | _:vb4132472 (an orphan bnode) |
| ns0:agential | _:vb4132473 (an orphan bnode) |
| ns0:sourceInfo | #sourceinfo |
| ns0:spatial | _:vb4132474 (an orphan bnode) |
| ns0:temporal | _:vb4132475 (an orphan bnode) |
| schema:about | <http://id.ndl.go.jp/class/ndlc/ND371> (➜ "電気工学--電子工学--部品--半導体素子") |
| schema:creator | <https://jpsearch.go.jp/entity/ncname/Prem_Pal,_Kasuo_Sato> (➜ "Prem Pal, Kasuo Sato") |
| schema:datePublished | "2017" |
| schema:description 2 | "書誌ID: 028013870" |
| schema:description | "数量・大きさ等: xii, 412 pages : illustrations (some color) ; 24 cm" |
| schema:identifier | "ISBN:9789814613729" |
| schema:inLanguage | <http://id.loc.gov/vocabulary/iso639-2/eng> (➜ "英語") |
| schema:isbn | "9789814613729" |
| schema:publisher | <https://jpsearch.go.jp/entity/ncname/Pan_Stanford_Publishing> (➜ "Pan Stanford Publishing") |
| schema:spatial | <https://jpsearch.go.jp/entity/place/シンガポール> |
| schema:temporal | <https://jpsearch.go.jp/entity/time/2017> (➜ "2017年") |